金屬蝕刻過程的控制
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<b style="text-indent: 21.1pt;"><span style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.earance.com/">金屬蝕刻</a></span></b><span style="text-indent: 21.1pt; font-family: 宋體; font-size: 10.5pt;"><font face="宋體">質量的保證主要來自于對蝕刻過程的控制</font>,</span><b style="text-indent: 21.1pt;"><span style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.earance.com/">金屬蝕刻</a></span></b><span style="text-indent: 21.1pt; font-family: 宋體; font-size: 10.5pt;">過程的控制分為化學參數(shù)</span><span style="font-family: 宋體; font-size: 10.5pt;">控制和物理參數(shù)控制。</span></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">?</span></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">1.<font face="宋體">化學參數(shù)控制</font></span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">化學參數(shù)控制對于維持蝕刻液均勻的蝕刻速度是非常關鍵的</font>,<font face="宋體">化學參數(shù)控制主要</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">包括溶液濃度的控制和溶液中各組分之間的比例控制。對這兩方面的控制</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">前者的濃度控制</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">容易</font>,<font face="宋體">可以通過分析的方法就能確定溶液中成分的消耗情況。而對于后者控制難度要大一些</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">主要是因為蝕刻液中的添加物質含量較低</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">并且可能是一些較難分析的材料</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">或和蝕刻液</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">中的主料分離較為困難。</span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">化學參數(shù)控制的依據(jù)來源于對溶液成分的分析而不是經驗的估計</font>,<font face="宋體">當然對于一些小廠并</font></span><span style="font-family: 宋體; font-size: 10.5pt;">不排除操作者可以通過觀察蝕刻過程進行的激烈程度、被蝕刻金屬表面的狀態(tài)以及溶液顏色</span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">的變化再根據(jù)經驗來進行調節(jié)</font>,<font face="宋體">并滿足在一定程度上的可控性。這種方式對于成分單一的蝕</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">刻液具有一定的實用性</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">但對于成分組成復雜</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">同時對金屬蝕刻深度均一性要求較高的工件</font><font face="Calibri" style="font-size: 10.5pt;">,</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">采用這種方法有很大的局限性</font>,<font face="宋體">難于保證批量生產的需要。從保證產品質量穩(wěn)定的角度出發(fā)</font><font face="Calibri">,</font></span><span style="font-family: 宋體; font-size: 10.5pt;">要求蝕刻廠能把分析結果作為調整蝕刻液的依據(jù)。</span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">化學蝕刻溶液的分析周期主要受以下幾方面因素的影響</font>:<font face="宋體">①溶液體積</font><font face="Calibri">;</font><font face="宋體">②溶液的初始濃</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">度</font><span style="font-family: 宋體; font-size: 10.5pt;">;</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">③單位體積的負荷量</font><font face="Calibri" style="font-size: 10.5pt;">;</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">④蝕刻量</font><font face="Calibri" style="font-size: 10.5pt;">(</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">一般以日為單位</font><font face="Calibri" style="font-size: 10.5pt;">)</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">。對這幾方面的影響因素很容易理解</font><font face="Calibri" style="font-size: 10.5pt;">,</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">溶液體積小、溶液初始濃度低、單位體積的負荷量較大的情況下</font>,<font face="宋體">蝕刻液成分的變化速度就快其分析周期就較短</font><font face="Calibri">,</font><font face="宋體">反之則長。通常而言</font><font face="Calibri">,</font><font face="宋體">如果蝕刻溶液體積不大</font><font face="Calibri">,</font><font face="宋體">批量生產的情況下應保持</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">每個班次分析一次</font><span style="font-family: 宋體; font-size: 10.5pt;">(</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">這里的班次是以</font><font face="Calibri" style="font-size: 10.5pt;">8h</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">為一個生產周期計算</font><font face="Calibri" style="font-size: 10.5pt;">)</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">。</font></p>
<p class="MsoNormal" style="text-indent: 21pt; text-align: center;"><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.earance.com/"><img src="/include/upload/fck/_DSC6351.jpg" width="600" height="467" alt="" /></a></font></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">?</span></p>
<p class="MsoNormal"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">2.<font face="宋體">物理參數(shù)控制</font></span><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">物理參數(shù)的控制分為通用參數(shù)控制及蝕刻方式所決定的其他參數(shù)控制。通用參數(shù)控制主</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">要是對在蝕刻過程中時間、溫度進行控制</font><span style="font-family: 宋體; font-size: 10.5pt;">:</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">由蝕刻方式所決定的其他參數(shù)控制包括浸泡蝕刻的溶液攪拌程度的控制以及噴射蝕刻的噴射壓力的控制。在化學參數(shù)可控范圍內</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">物理參數(shù)的控制對于維持其蝕刻速度的恒定及蝕刻均勻性是非常重要的。物理參數(shù)的控制相對于化學參數(shù)的控制來說要容易得多</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">也直觀得多。同時</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">一些設備對溫度、時間及噴射壓力都有自控裝置</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">只需要預先將這些參數(shù)輸人即可。</font></p>
<p class="MsoNormal" style="text-indent: 21pt; text-align: center;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">?<img src="/include/upload/fck/碼盤(5).jpg" width="600" height="467" alt="" /></span></p>
<p class="MsoNormal" style="text-indent:21.0000pt;mso-char-indent-count:2.0000;"><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">任何</span><b><span style="font-family: 宋體; font-size: 10.5pt;"><a href="http://www.earance.com/">金屬蝕刻</a></span></b><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">都一定有兩個需要控制的指標</font>,<font face="宋體">即深度和表面平滑度。雖然物理因素和化</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">學因素的變化都會對蝕刻深度及表面平滑度產生影響</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">但在確定的蝕刻液成分及濃度的情況</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">下</font>,<font face="宋體">對深度的影響主要是物理因素</font><font face="Calibri">,</font><font face="宋體">在溫度、壓力恒定的前提下</font><font face="Calibri">,</font><font face="宋體">確保蝕刻深度指標的因素</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">是蝕刻時間</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">在實際生產中也是通過時間來對蝕刻深度進行控制。而對于表面平滑度</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">雖</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><font face="宋體">然溫度的變化會有一定的影響</font>,<font face="宋體">但主要還是受蝕刻液的化學組分的影響</font><font face="Calibri">,</font><font face="宋體">在化學組中添加物質</font></span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">對表面平滑度的影響比蝕刻主劑的影響更大</font><span style="font-family: 宋體; font-size: 10.5pt;">,</span><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">同時調整也更困難</font><font face="Calibri" style="font-size: 10.5pt;">,</font><font face="宋體" style="font-family: 宋體; font-size: 10.5pt;">但可以通過實驗確定一個單</font><span style="mso-spacerun:′yes′;font-family:宋體;mso-ascii-font-family:Calibri;mso-hansi-font-family:Calibri;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;">位面積消耗量的經驗值來控制。</span><span style="mso-spacerun:′yes′;font-family:Calibri;mso-fareast-font-family:宋體;mso-bidi-font-family:′Times New Roman′;font-size:10.5000pt;mso-font-kerning:1.0000pt;"><o:p></o:p></span></p>
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